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0010-22161 High EFF RF MatchversusRFS-O-11 Atomic Oxygen Plasma Source

Applied Materials 0010-22161 High EFF RF Match, Veeco RFS-O-11 Atomic Oxygen Plasma Source, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-22161 High EFF RF MatchApplied Materials
RFS-O-11 Atomic Oxygen Plasma SourceVeeco
OEMApplied MaterialsVeeco
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchVeeco RFS-O-11 Atomic Oxygen Plasma Source
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Custom - Custom MBE System[3]
RFS Housing Option—Standard - Standard Housing[3]
Oxygen Plasma Accy Package—Accy1 - Standard O2 Plasma Accy Pkg Standard[3]
Housing Option—Standard[3]
Oxygen Plasma Bulb Assembly—Bulb1[3]
Matching Unit Option—None[3]
0010-22161 High EFF RF Match entryRFS-O-11 Atomic Oxygen Plasma Source entryAsk about these tools →Share experience with this comparison →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing