Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Temescal FCE-2500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | FCE-2500Temescal |
|---|---|---|
| OEM | Applied Materials | Temescal |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Temescal FCE-2500 |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | FCE-2500[1] |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| System type | — | deposition system[1] |
| Spare parts coverage | — | Listed among Temescal standard systems with spare parts kits[1] |
| O-ring spares kit part no. | — | 0625-6200-0[1] |
| Shields kit part no. for FCE-2500 SN 101-107 | — | 0625-6570-0[1] |
| Shields kit part no. for FCE-2500 SN 108 and above | — | 0625-6570-1[1] |
| Dimensions: Vacuum Cubicle | — | Width 41.0 in (1054 mm), Depth 66.0 in (1680 mm), Height 81.0 in (2060 mm)[4] |
| Weight: Vacuum Cubicle | — | 3300 lbs (1500 kg)[4] |
| Dimensions: Product Chamber | — | Width 28 in (711 mm), Depth 28 in (711 mm), Height 18 in (457 mm)[4] |
| Product Chamber Volume | — | 231 liters[4] |
| Source Chamber Diameter | — | 18 inches (457 mm)[4] |
| Source Chamber Volume | — | 169 liters[4] |
| Dimensions: Control Cabinet | — | Width 24.0 in (610 mm), Depth 35.5 in (902 mm), Height 79.5 in (2019 mm)[4] |
| Weight: Control Cabinet | — | 800 lbs (363 kg)[4] |
| Dimensions: Power Supply Cabinet | — | Width 25.3 in (643 mm), Depth 27.0 in (686 mm), Height 72.0 in (1828 mm)[4] |
| Weight: Power Supply Cabinet | — | 1100 lbs (500 kg)[4] |
| Dimensions: Power Distribution Box (wall mounted) | — | Width 31.5 in (800 mm), Depth 12.0 in (305 mm), Height 39.5 in (1004 mm)[4] |
| Weight: Power Distribution Box | — | 176 lbs (80 kg) for 208-240 VAC systems; 300 lbs (136 kg) for 380+ VAC systems[4] |
| Accommodates | — | Multiple electron beam and resistance-heated sources[5] |
| Options | — | Ion milling and substrate heat options available[5] |
| Control System | — | Temescal PC/PLC Control System with color touchscreen; three modes: Service, Manual, Automatic[4] |
| O-ring spares kit part number | — | 0625-6200-0[1] |
| Shields kit part number (SN 101-107) | — | 0625-6570-0[1] |
| Shields kit part number (SN 108 and above) | — | 0625-6570-1[1] |