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0010-22161 High EFF RF MatchversusSST 421 Spray Solvent

Applied Materials 0010-22161 High EFF RF Match, Semitool SST 421 Spray Solvent, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsSemitool
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchSemitool SST 421 Spray Solvent
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]SST-421[4]
DescriptionHTESC PH 1 REV A[2]Spray Solvent Tool[6]
ConditionUsed[2]—
Stock NumberBM6628[2]—
Voltage—400 Vac / 35 A[3]
Manufacturer—Semitool[5]
Tool type—Automated Spray Solvent Tool (SST)[4]
Process role—Batch Solvent Processor for Wafer Cleaning[4]
Wafer size—8"/200mm[4]
Number of tanks—4[8]
Number of heated tanks—2[8]
Single chamber—Yes[4]
Rotor included—1 rotor included[4]
Sources (8)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]classoneequipment.comclassoneequipment.com
  5. [5]Equipment inventory listing
  6. [6]fabsurplus.comfabsurplus.com
  7. [7]classoneequipment.comclassoneequipment.com
  8. [8]hfsemi.comhfsemi.com