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0010-22161 High EFF RF MatchversusTMU 064 P Turbo

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer TMU 064 P Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer TMU 064
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]TMU 064 P[4]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Voltage—24V / 48V / 72V / 140V[3]
Configuration—DC 4.3A[4]
OEM—Pfeiffer[4]
Equipment type—Turbo pump[4]
Configuration / current—DC 4.3A[4]
Output current—6.5A[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing