Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Pfeiffer DUO 20 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | DUO 20 M VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Pfeiffer Duo |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Oil | — | P3[4] |
| Max flow | — | 24.0 m³/h[4] |
| Speed | — | 1800 1/min[4] |
| Mass | — | 42.5 kg[5] |
| Configuration | — | Pump needs complete overhaul[4] |
| Pump type | — | Dual-stage, high-performance rotary vane pump[1] |
| Applications | — | Low and medium vacuum applications[1] |
| Pumping speed at 50 Hz | — | 20 m3/h[1] |
| Pumping speed at 60 Hz | — | 24 m3/h[1] |
| Flange (in) | — | DN 25 ISO-KF[1] |
| Flange (out) | — | DN 25 ISO-KF[1] |
| Operating fluid | — | P3[1] |
| Operating fluid filling | — | 1.1 l[1] |
| Rated power 50 Hz | — | 0.75 kW[1] |
| Rated power 60 Hz | — | 0.90 kW[1] |
| Rotation speed at 50 Hz | — | 1500 min-1[1] |
| Rotation speed at 60 Hz | — | 1800 min-1[1] |
| Ultimate pressure with gas ballast | — | 4 × 10^-3 hPa[1] |
| Ultimate pressure without gas ballast | — | 2 × 10^-3 hPa[1] |
| Weight | — | 44 kg[1] |
| Inlet flange | — | DN 25 ISO-KF[1] |
| Outlet flange | — | DN 25 ISO-KF[1] |
| Magnetic coupling | — | Yes[1] |
| Integrated gas ballast | — | Yes[1] |
| HV safety valve | — | Integrated[6] |
| Motor type | — | 1-phase motor[1] |
| Voltage | — | 100-110 V at 50 Hz; 100-120 V at 60 Hz[1] |