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Comparison ledger

0010-22161 High EFF RF MatchversusiH 1000 Dry

Applied Materials 0010-22161 High EFF RF Match, Edwards iH 1000 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run—1990–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEdwards iH 1000 Dry
Cited variants—
  • iH1000[1]
  • iH1000 Enhanced[1]
  • iH1000 HEAC[1]
  • iH1000 New Look[1]
  • iH1000 Mark V[1]
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]iH 1000[4]
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Manufacturer—Edwards[4]
Product type—Dry pump[5]
Inlet connection—ISO 100[6]
Outlet connection—KF 40[6]
Pumping speed—560 cfm[6]
Ultimate pressure—1.5x10-3 Torr[6]
Motor—3 Phase, 208V, 50/60Hz[5]
Weight—948 lbs[5]
Voltage / frequency—200-208 V, 50/60 Hz[6]
Power input—3.5 kW[6]
Rated motor power—5.1 kW[6]
Oil capacity—1.48 l[6]
Dimensions—909 x 839 x 390 mm[5]
Sources (6)Every fact above is drawn from these public sources
  1. [1]trilliumus.comtrilliumus.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]Equipment inventory listing
  5. [5]provac.comprovac.com
  6. [6]ajvs.comajvs.com