Waferpedia

Comparison ledger

0010-21246 PartversusVigus RK 3

Applied Materials 0010-21246 Part, Tokyo Electron Vigus RK 3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
Vigus RK 3Tokyo Electron
OEMApplied MaterialsTokyo Electron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tokyo Electron Vigus RK 3
Specifications
Wafer Size—12 inch[1]
Vintage—2010[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing