Waferpedia

Comparison ledger

0010-21246 Partversus870 S SRD

Applied Materials 0010-21246 Part, Semitool 870 S SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
870 S SRDSemitool
OEMApplied MaterialsSemitool
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Semitool 870
Specifications
Configuration—120 Volts AC[1]
Phase—1 Phase[1]
Voltage—120 Vac[2]
Type—Spin Rinse Dryer (SRD)[3]
Manufacturer—Semitool[3]
Model—870 S[3]
Wafer size—6 inch (6")[1]
Electrical supply—120 VAC, 1 phase, 3 wire[1]
Frequency—50/60 Hz[1]
Vintage—2005[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing