Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi SU8230, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | SU8230Hitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi SU8230 |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | — |
| Role | — | Cleanroom scanning electron microscope (SEM)[2] |
| Facility reference | — | SEM-10[2] |
| Manufacturer | — | Hitachi[2] |
| Model | — | SU8230[2] |
| Training prerequisite note | — | Qualification on the SEM-10 Hitachi SU8230 is a prerequisite to SP-4 training and access.[2] |
| Instrument type | — | Field Emission Gun Scanning Electron Microscope (FEGSEM)[3] |
| Gun type | — | Cold field emission (CFE) gun[4] |
| Resolution at 15 kV | — | 0.8 nm at 15 kV and 4.0 mm working distance[3] |
| Resolution at 1.0 kV | — | 1.1 nm at 1.0 kV landing voltage and 1.5 mm working distance[3] |
| Landing voltage range | — | 30 kV to 0.01 kV[3] |
| Beam deceleration mode landing voltage range | — | 0.01 kV to 2 kV[3] |
| Magnification range in high magnification mode | — | 100X to 1,000,000X[3] |
| Magnification range in low magnification mode | — | 20X to 2000X[3] |
| Sample chamber | — | 6 inch sample chamber[3] |
| Cryo trap | — | Integrated LN2 cryo trap[3] |
| Stage | — | 5-axis motorized stage[3] |
| Non-cryo stage travel | — | X/Y 0-110 mm; Z 1.5-40 mm; Tilt -5 to +70; Rotation 360[3] |
| Cryo stage travel | — | X/Y approximately +/- 9 mm; Z 1.5-40 mm; Tilt 30 at Z=8 mm or greater, 15 at 5 mm, 0 at 1.5 mm; Rotation 0[3] |
| Vacuum system | — | Specimen chamber turbo + scroll dry pump; gun/column ion pumps x3 plus non-evaporative getter[3] |
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