Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi SU 8030 FEG-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | SU 8030 FEG-SEMHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi SU |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[2] |
| Wafer size | — | 4" Wafer Holder for SU8030/SU8040[2] |
| Stage | — | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[2] |
| Detector System | — | Triple Electron Detector System w/ Super ExB[2] |
| Specimen Airlock | — | 6" Specimen Exchange Airlock[2] |
| Beam Deceleration | — | Beam Deceleration System[2] |
| Vacuum System | — | TMP Dry Vacuum System[2] |
| EDS Integration | — | EDS Ready with DBC (P/N536-9805) and RS-232 Interface (P/N536-9807)[2] |
| Operating System | — | Windows XP[2] |
| Safety Compliance | — | UL and S2-02 Safety Compliance[2] |
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