Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Bruker Dektak 150, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | Dektak 150Bruker |
|---|---|---|
| OEM | Applied Materials | Bruker |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Bruker Dektak |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | for parts[2] |
| Scan Length | — | 55mm (2.16in.)[3] |
| Data Points Per Scan | — | 60,000 maximum[3] |
| Step Height Repeatability | — | 6Å, 1 sigma on 1μm step[3] |
| Vertical Resolution | — | 1Å max. (at 6.55μm range)[3] |
| Max Sample Thickness | — | Up to 100mm (4in.)[3] |
| Max Sample Size | — | 150mm (6in.)[3] |
| Stage Travel | — | 100mm (4 inches)[3] |
| Stage Repeatability | — | 1μm[3] |
| Stage Resolution | — | 0.5μm[3] |
| Stylus Radius Options | — | from 50nm to 25μm[3] |
| Camera | — | 640 x 480-pixel, manual zoom variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)[3] |
| Maximum scan length | — | 55mm (2.16in.)[3] |
| Maximum data points per scan | — | 60,000[3] |
| Maximum sample thickness | — | Up to 100mm (4in.)[3] |
| Maximum sample size | — | 150mm (6in.)[3] |
| Y automatic stage travel | — | 100mm (4 inches), 1μm repeatability, 0.5μm resolution[3] |
| Film thickness measurement range | — | up to 1000μm[3] |
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