Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Tokyo Electron SCCM Shin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | SCCM ShinTokyo Electron |
|---|---|---|
| OEM | Applied Materials | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Tokyo Electron SCCM Shin |
| Specifications | ||
| OEM | Applied Materials[1] | Tokyo Electron[3] |
| Model | 0010-16392[1] | SCCM Shin[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Category | — | Etch[4] |
| Vintage | — | 2005[3] |
| Description | — | Oxide etcher with qty 3 chambers[5] |
| Version | — | 300 mm[5] |
| Tool type | — | TSP-30555SSS[5] |
| Load ports | — | 3[5] |
| Etch process chambers | — | 3[5] |
| RF generator (top) | — | Daihen AGA-50B 60 MHz 5 kW[5] |
| RF generator (bottom) | — | Daihen WGA-50E 2 MHz 5 kW[5] |
| Other chamber component | — | Daihen DGP-120A2[5] |
| Gate valves | — | Vat gate valves[5] |
| Vacuum pumps | — | Shimadzu turbo pumps[5] |
| DC power supplies | — | Kyosan DC power supplies[5] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →