Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Plasma-Therm Versaline LACVD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Versaline LACVDPlasma-Therm |
|---|---|---|
| OEM | Applied Materials | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Plasma-Therm Versaline |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 2x loadlock Ports[3] |
| Operating system | — | Windows 7 Professional SP1 OS[3] |
| Tool software | — | Plasma-Therm Cortex[3] |
| OES Software | — | Plasma-Therm EndpointWorks[3] |
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