Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusPlasmalab 100 Plus ICP

Applied Materials 0010-16392 ESC Assembly, Oxford Instruments Plasmalab 100 Plus ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
Plasmalab 100 Plus ICPOxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyOxford Instruments Plasmalab 100 Plus ICP
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]Plasmalab 100 Plus[3]
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Tool type—ICP Etcher (Inductively Coupled Plasma)[3]
Make—Oxford[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]Equipment inventory listing