Waferpedia

Comparison ledger

0010-16392 ESC Assemblyversusngp80-rie

Applied Materials 0010-16392 ESC Assembly, Oxford Instruments ngp80-rie, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
ngp80-rieOxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyOxford Instruments ngp80-rie
Specifications
OEMApplied Materials[1]Oxford[3]
Model0010-16392[1]NGP80 RIE[3]
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Related equipment page label—Oxford NGP80 RIE[3]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca