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Comparison ledger

0010-16392 ESC AssemblyversusMarch AP 1000

Applied Materials 0010-16392 ESC Assembly, Nordson March AP 1000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
OEMApplied MaterialsNordson
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyNordson March
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]—
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Frequency—50 Hz[3]
CB Current—25 A[3]
SCCR—10 kA[3]
Configuration—Includes vacuum pump & RF generator[4]
RF Generator Power (optional)—600 W or 1000 W (Seren, 13.6 MHz)[5]
Vacuum Pump—Included (dry or wet pump options)[6]
Power—50 Hz[4]
Vacuum—Included (dry or wet pump options)[4]
RF Generator Power—600 W or 1000 W (Seren, 13.6 MHz)[4]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]nc-p-001.sitecorecontenthub.cloudnc-p-001.sitecorecontenthub.cloud
  6. [6]Equipment inventory listing