Waferpedia

Comparison ledger

0010-16392 ESC Assemblyversus4520 XLE

Applied Materials 0010-16392 ESC Assembly, Lam Research 4520 XLE, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
4520 XLELam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research Rainbow 4520
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]—
TypeESC Assembly[1]Etcher[4]
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Configuration—Parts System[3]
Make—Lam[4]
Wafer size—8 inch[4]
Listing type—Parts System[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]inventory listing
  4. [4]Equipment inventory listing