Waferpedia

Comparison ledger

0010-13627 High Efficiency RF MatchversusTurbotronik NT 10 Turbomolecular Vacuum Pump Controller

Applied Materials 0010-13627 High Efficiency RF Match, Leybold Turbotronik NT 10 Turbomolecular Vacuum Pump Controller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsLeybold
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchLeybold Turbotronik
Cited variants—
  • Turbotronik NT 10 (200-240 V)[1]
  • Turbotronik NT 10 (100-120 V)[1]
Specifications
ConfigurationHE, BIAS[2]180-260V[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
Supply voltage (range)—180-260 V[3]
U (secondary voltage range)—90-140[3]
Power consumption—65/35 VA[3]
Frequency—50/60 Hz[3]
Factory-set supply voltage ranges—200-240 V (cat. 859 00) or 100-120 V (cat. 859 01)[1]
Form factor—Desktop or 19-inch rack mount, 3 HE[1]
Front panel interface—Membrane keypad, 4 LEDs, START and STOP keys[1]
Rear panel connectors—10-pin Phoenix connector for remote monitoring/control, 5-pin connector for TURBOVAC[1]
Resonance monitoring—Yes, for TURBOVAC 50D; shuts down if pump remains 45,000–55,000 RPM for >1 minute[4]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]manualslib.commanualslib.com