Comparison ledger
Applied Materials 0010-13622 RF Match for, Varian 3118, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | 3118Varian |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Varian 3118 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[2] | — |
| Model | 0010-13622[2] | 3118[3] |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[2] | — |
| Feature | High Efficiency HE RF Match-Bias[2] | — |
| System Type | — | Electron beam evaporator thin film deposition system[3] |
| OEM | — | Varian[3] |
| High Voltage Power Supply | — | Edwards Temescal CV-GSLX[3] |
| Beam Controller | — | Temescal beam controller with remote[3] |
| Heater Power Supplies | — | CHA heater power supplies[3] |
| SCR Power Supplies | — | Varian SCR power supplies[3] |
| Vacuum Pump | — | Pfeiffer Adixen ACP 28 dry vacuum pump (not included)[3] |
| Cryogenic Pumping | — | CTI Cryogenics cryo compressor[3] |
| Chiller | — | Neslab ThermoFlex 2500 (not included)[3] |
| Substrate Configuration | — | Slot rotating substrate holder with planetary shields[3] |
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