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Comparison ledger

0010-13622 RF Match forversusMark 50

Applied Materials 0010-13622 RF Match for, CHA Mark 50, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsCHA
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forCHA Mark 50
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]updated to control the deposition and chambers.[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Process type—Physical Vapor Deposition (PVD)[3]
Wafer size—6 inch[3]
Deposition type—Thin-film deposition[4]
Control upgrade—Computer added to track processes[2]
Power supply upgrade—New Glassman voltage supply[2]
Controller upgrade—Updated Infinicon controller[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]web.archive.orgweb.archive.org