Waferpedia

Comparison ledger

0010-13622 RF Match forversusIntegra RS

Applied Materials 0010-13622 RF Match for, Axcelis Integra RS, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Integra RSAxcelis
OEMApplied MaterialsAxcelis
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forAxcelis Integra RS
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]—
Model0010-13622[1]Integra RS[2]
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Manufacturer—Axcelis[2]
Process type—CVD (Chemical Vapor Deposition)[2]
Vintage—2012[2]
Application—Production of 3x nm and below NAND Flash devices[3]
Platform—single, modular wafer handling platform[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]prnewswire.comprnewswire.com