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0010-13622 RF Match forversusEndura

Applied Materials 0010-13622 RF Match for, Applied Materials Endura, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
EnduraApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forApplied Materials Endura
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]Cu SIP[2]
Model0010-13622[1]Endura[2]
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Deposition—Directional eSIP TaN (barrier/seed)[5]
Capability—Sputters into contacts & vias[5]
Chambers—eSIP TaN .Tin - Multiple Degas[5]
Process type—Physical Vapor Deposition (PVD)[2]
Wafer size—6 inch[6]
Chamber material—Copper (Cu)[2]
Vintage year—1995[6]
OEM—Applied Materials[2]
Equipment type—PVD Chamber (Physical Vapor Deposition)[2]
Product details—12" - Cu SIP - Part Numbers: 0010-04662, 0040-48541, 0040-03982[2]
Vintage—1996 Vintage[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]Equipment inventory listing
  7. [7]Equipment inventory listing