Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusNanospec 3000

Applied Materials 0010-03485 Magnet Assy, Onto Innovation Nanospec 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
Nanospec 3000Onto Innovation
OEMApplied MaterialsOnto Innovation
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyOnto Innovation Nanospec 3000
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]3"-6"[5]
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Wavelength range—480-800 nm[5]
Wavelength range (alternative)—400-800 nm[6]
Film thickness range—250 A to 35 µm[5]
Film thickness range (alternative)—100A up to 20um (resolution 50A)[6]
Maximum film thickness—30µm[6]
Measurement spot size—25 µm[5]
Measurement spot size (alternative)—25um, down to 100nm at 40X objective[6]
Measurement time—0.25 s to 4 s / site[5]
Measurement time (alternative)—less than 3 seconds[6]
Number of layers—3[5]
Number of layers (alternative)—up to 3 films[6]
Detector—Linear diode array detector[5]
Reproducibility—<2 A[5]
Wafer size (alternative)—up to 6"/150mm[6]
Objective magnifications—5X, 10X (default), 50X[7]
Spot size per objective—5X: 50 µm; 10X: 25 µm; 50X: 5 µm[7]
Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]tech-semi.comtech-semi.com
  6. [6]semistarcorp.comsemistarcorp.com
  7. [7]nanofab.utah.edunanofab.utah.edu