Comparison ledger
Applied Materials 0010-03485 Magnet Assy, KLA Surfscan 6200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03485 Magnet AssyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-03485 Magnet Assy | KLA Surfscan 6200 |
| Specifications | ||
| Configuration | WP AL 300mm PVD[1] | — |
| OEM | Applied Materials[1] | — |
| Model | 0010-03485[1] | — |
| Description | MAGNET ASSY, WP AL 300MM PVD[2] | — |
| Process | PVD[3] | — |
| Wafer size | 300mm[4] | — |
| Version | Spares[4] | — |
| Part Number | 0010-03485[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Process Type | PVD (Physical Vapor Deposition)[1] | — |
| Application (Material) | Aluminum (AL)[1] | — |
| Wafer Diameter (associated) | 300 mm[1] | — |
| Wafer Sizes Supported | — | 50mm (2"), 76mm (3"), 100mm (4"), 125mm (5"), 150mm (6"), 200mm (8")[5] |
| Defect Sensitivity | — | 0.10 µm diameter PSL sphere equivalent with greater than 90% capture rate[5] |
| Defect Sensitivity (alternative) | — | 0.12 µm[6] |
| Illumination Source | — | 30 mW Argon-Ion laser, 488 nm wavelength[5] |
| Haze Sensitivity | — | 0.02 ppm[5] |
| Haze Resolution | — | 0.002 ppm[5] |
| Repeatability | — | 0.5% at 1σ (mean count >500, 0.364 µm latex spheres)[5] |
| Accuracy | — | ≥99% (verified with VLSI Standards)[5] |
| Dynamic Range | — | 0.01 µm to 9,999 µm in a single measurement[5] |
| Throughput | — | Up to 100 w/hr using 150mm wafers[5] |
| Cassette Handling | — | Single puck wafer handling from two cassette (one sender/receiver, one receiver)[5] |
| Operating System / Software | — | Microsoft Windows 98, version 4.2[6] |
| Dimensions (H x W x D) | — | 168 cm x 75 cm x 77 cm (66" x 29.5" x 30.25")[5] |
| Weight | — | 240 kg (530 lbs)[5] |