Comparison ledger
Applied Materials 0010-03485 Magnet Assy, KLA RS 100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03485 Magnet AssyApplied Materials | RS 100KLA |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-03485 Magnet Assy | KLA RS 100 |
| Specifications | ||
| Configuration | WP AL 300mm PVD[1] | — |
| OEM | Applied Materials[1] | — |
| Model | 0010-03485[1] | — |
| Description | MAGNET ASSY, WP AL 300MM PVD[2] | — |
| Process | PVD[3] | — |
| Wafer size | 300mm[4] | — |
| Version | Spares[4] | — |
| Part Number | 0010-03485[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Process Type | PVD (Physical Vapor Deposition)[1] | — |
| Application (Material) | Aluminum (AL)[1] | — |
| Wafer Diameter (associated) | 300 mm[1] | — |
| Wafer size range | — | 2 to 12 inch[5] |
| Measurement type | — | Sheet resistance (four-point probe)[5] |
| Measurement range | — | >5 mΩ/sq to <5 MΩ/sq[5] |
| Absolute accuracy | — | ±1% of certified value (NIST traceable, corrected to 23°C)[5] |
| Measurement repeatability | — | <0.2% (1σ) at 1σ test diameter with appropriate probe head[5] |
| Reproducibility (metals) | — | <0.5% for Cu, W, TiN[5] |
| Edge exclusion | — | 1 mm from edge of conductive film[5] |
| Sites programmable (routine) | — | 1 to 30 sites (ASTM standard tests included)[5] |
| Sites programmable (mapping) | — | Up to 1,200 sites (XY maps and user-defined patterns)[5] |
| Wafer loading | — | Manual, open cassette (200/300mm)[5] |
| Wafer aligner | — | High-speed, on-stage optical aligner with CCD and ring illuminator[5] |
| Probe head types | — | Type A, B, C, D, E, F, H (one precision probe head)[5] |
| Computer system | — | Pentium III with keyboard and trackball[5] |
| Operating system | — | Windows NT[5] |
| Software version | — | 2.31[5] |
| AC voltage | — | 200–240 VAC[5] |
| Vacuum requirement | — | Min 25 inHg[5] |
| Air supply | — | 80–100 PSI[5] |