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Comparison ledger

0010-03485 Magnet Assyversus5100

Applied Materials 0010-03485 Magnet Assy, KLA 5100, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
5100KLA
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyKLA 5100
Cited variants—
  • 5100 XP Overlay Measurement[1]
Specifications
ConfigurationWP AL 300mm PVD[2]—
OEMApplied Materials[2]—
Model0010-03485[2]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]8-inch wafers[6]
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]—
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Step measurement range—100 Å to 300 µm[6]
Sample table—200 mm with vacuum[6]
Maximum sample thickness—20 mm[6]
Minimum sample length—25 mm[6]
Wafer handling—Dual SMIF Cassette loader, 200mm[6]
Optics—12k and 750 micron FOV optical microscopes with light source[6]
Microscope—50 micron FOV with optical measurement, interferometer measurement, and autofocus[6]
Software—Windows NT / VAX[6]
Operating system—VMS[6]
Backup—SCSI back up unit[6]
Printer—Thermal mini printer[6]
Tool type—metrology and inspection tool[6]
Measurement application—overlay measurement on wafers[6]
Optical system—optical microscopes for measurement functions[6]
Microscope set—12k microscope and a 750 micron field-of-view microscope with a light source[6]
Microscope functions—50 micron field-of-view microscope performs optical measurement, interferometer measurement, and autofocus[6]
Measurement range—100 Å to 300 µm[6]
Control software—Windows NT / VAX software[6]
Backup unit—SCSI Back up unit[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com
  6. [6]waferpedia.comwaferpedia.com