Comparison ledger
Applied Materials 0010-03254 E Chuck, Varian 948 Helium Leak Detector, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 948 Helium Leak DetectorVarian |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Varian 948 Helium Leak Detector |
| Specifications | ||
| Equipment type | — | helium leak detector[1] |
| Weight | — | 510 lbs[1] |
| Recommended turbo pump | — | TV-70, TV-70D[1] |
| Recommended forepump | — | DS-202, DS-302, DS-402[1] |
| Cold trap | — | nitrogen cold trap (models 948/960 only)[2] |
| Pump configuration | — | can be configured with dry or wet pumps[2] |
| Factory tuning | — | shipped tuned to helium on Filament No. 1[3] |
| OEM | — | Varian[4] |
| Model | — | 948[4] |
| Family | — | 947, 948, and 960 leak detectors[2] |
| Detector principle | — | Helium mass spectrometer leak detector[3] |
| Access feature | — | Door on the working surface provides access to the nitrogen cold trap[2] |
| Rear panel information | — | Leak rate and system status information is available through the rear panel I/O[3] |
| Product type | — | Helium leak detector[1] |
| Manufacturer | — | Varian[4] |
| Nitrogen cold trap | — | Included[2] |
| Model family | — | Models 947, 948 and 960 leak detectors[2] |