Waferpedia

Comparison ledger

0010-03254 E ChuckversusSE 1000 6 6 Environmental

Applied Materials 0010-03254 E Chuck, Thermotron SE 1000 6 6 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsThermotron
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Family—Thermotron SE 1000 6 6 Environmental
Specifications
Workspace Volume—34.8 ft³ / 986 L[1]
Temperature Range—-70ºC to 180ºC[1]
Temperature Uniformity—±0.5ºC[1]
Humidity Range—10 to 98% RH[1]
Humidity Control—+/- 2.5% RH[1]
Airflow—1,000 CFM[1]
Heating Performance (-65° to 71°C)—20 minutes / 6.8°C per minute[1]
Cooling Performance (85° to -40°C)—26 minutes / 4.7°C per minute[1]
Electrical Requirements (460 V / 3 / 60)—32 Full Load Amps[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]thermotron.comthermotron.com