Comparison ledger
Applied Materials 0010-03254 E Chuck, SUSS MicroTec Gamma, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | GammaSUSS MicroTec |
|---|---|---|
| OEM | Applied Materials | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | SUSS MicroTec GAMMA |
| Specifications | ||
| Type | — | Coater / Developer[1] |
| Wafer size support | — | 100mm through 200mm[2] |
| Maximum substrate size | — | 8 inch[3] |
| Process capabilities | — | DUV resist and ARC coating, wafer baking, wafer developing, conformal coating on pieces to 200mm wafers[2] |