Waferpedia

Comparison ledger

0010-03254 E ChuckversusSK 80 BW-AVPE

Applied Materials 0010-03254 E Chuck, SCREEN SK 80 BW-AVPE, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsSCREEN
Category——
Wafer size—Wafer Transfer Robot x 1 (1 Block System)
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—SCREEN SK 80
Specifications
Process—Photo[1]
Configuration—4 Cassette Loading Port[1]
Cassette Index Station—4 Side Loading[1]
Wafer size—Wafer Transfer Robot x 1 (1 Block System)[1]
PR Resist Pump—Iwaki Bellows Pump 4 Set Per 1 Spin Unit[1]
Wafer Flow Direction—Right to Left[1]
Voltage—100V, 3.5 kW[2]
Main Body—CCD, ETU, TCU, Power Unit (USA)[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing