Waferpedia

Comparison ledger

0010-03254 E ChuckversusRTE 221 Chiller

Applied Materials 0010-03254 E Chuck, Neslab RTE 221 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsNeslab
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Neslab RTE
Specifications
Configuration—Z Pump[1]
Phase—1 Phase[1]
Voltage—115 V, 60 Hz[1]
Current—16A[1]
Heater Current—14A[1]
Pump—Z Pump[1]
Frequency—60 Hz[1]
Pump type—Z pump[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing