Waferpedia

Comparison ledger

0010-03254 E ChuckversusAA07B

Applied Materials 0010-03254 E Chuck, MKS AA07B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—MKS AA07B
Specifications
Full Scale range—1.33 x 10^5 to 2 x 10^7 Pa, 1000 Torr to 3000 psia[1]
Accuracy—1% of Reading[1]
Input Power—13 - 32 VDC @ 10 mA max[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]api.p1.mks.comapi.p1.mks.com