Comparison ledger
Applied Materials 0010-03254 E Chuck, Leybold Turbovac 50 Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Turbovac 50 TurboLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Leybold Turbovac 50 Turbo |
| Cited variants | — | |
| Specifications | ||
| Pump Type | — | Turbomolecular pump with grease-lubricated bearings[2] |
| Nominal rotation speed | — | 72000 rpm[3] |
| Run-up time | — | 2 min[3] |
| Ultimate pressure | — | < 5 x 10⁻⁸ mbar[3] |
| Weight | — | 2.0 kg (4.4 lbs)[3] |
| Max. power consumption | — | 45 W[3] |
| Power consumption at ultimate pressure | — | 15 W[3] |
| Admissible ambient temperature | — | 10 to 55 °C / 50 to 131 °F[3] |
| Cooling | — | Standard convection; optional air/water[3] |
| Max. foreline pressure for N₂ | — | 1 x 10⁻¹ mbar (7.5 x 10⁻² Torr)[3] |
| Recommended foreline pump | — | TRIVAC D 2.5 E[3] |
| Pumping speed for N₂ (DN 40 inlet) | — | 33 l/s[3] |
| Pumping speed for N₂ (DN 63 inlet) | — | 55 l/s[3] |
| Gas throughput for N₂ (DN 40 inlet) | — | 0.90 mbar l/s[3] |
| Gas throughput for N₂ (DN 63 inlet) | — | 1.00 mbar l/s[3] |
| Compression ratio for N₂ | — | 2 x 10⁶[3] |
| Compression ratio for He | — | 5 x 10²[3] |
| Compression ratio for H₂ | — | 2 x 10²[3] |