Waferpedia

Comparison ledger

0010-03254 E ChuckversusGasonics PEP 3510 Plus (H)

Applied Materials 0010-03254 E Chuck, Lam Research Gasonics PEP 3510 Plus (H), side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsLam Research
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Family—Lam Research Gasonics PEP 3510
Specifications
Phase—1 Phase[1]
Voltage—208 V[1]
Configuration—120-60 Hz[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing