Waferpedia

Comparison ledger

0010-03254 E ChuckversusCandela 8720

Applied Materials 0010-03254 E Chuck, KLA Candela 8720, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—KLA Candela 8720
Specifications
Wafer sizes—4, 5, 6, 8 inch[1]
Measurement channels—Scatter intensity, topographic variations, surface reflectivity, phase shift, photoluminescence[2]
Operating modes—High-throughput, standard resolution, high resolution[2]
Full-surface coverage—In minutes[2]
Detectable defect types—Micro-pits, cracks, hexagonal bumps, showerhead droplets, crescents, scratches[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]kla.comkla.com