Waferpedia

Comparison ledger

0010-03254 E ChuckversusTCC-151W

Applied Materials 0010-03254 E Chuck, Espec TCC-151W, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsEspec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
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Family—Espec TCC-151W
Cited variants—
Specifications
type—rapid-rate thermal cycle chamber[1]
model—TCC-151W[1]
temperature range—−70℃ to +180℃[1]
temperature rate of change—15K/min[1]
interior dimensions—800×500×400 mm[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp