Comparison ledger
Angstrom Engineering NexDep, Applied Materials 0020 18698 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NexDepAngstrom Engineering | 0020 18698 PartApplied Materials |
|---|---|---|
| OEM | Angstrom Engineering | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Angstrom Engineering NexDep | Applied Materials 0020 18698 Part |
| Cited variants | — | |
| Specifications | ||
| E-Beam pocket configuration | 6 x 7 cc multi-pocket E-Beam[1] | — |
| Chamber dimensions | 16" x 16" x 28"[1] | — |
| Chamber type | High aluminum high vacuum box chamber[1] | — |
| Base pressure | < 5 x 10^-7 Torr in a clean system[1] | — |
| Power supply | 3 kW[1] | — |
| Evaporation sources | Dual resistive evaporation sources[1] | — |
| Control | PC control station with fully automated sequences and software for deposition control[1] | — |
| Deposition modes | Combined co-deposition processing with e-beam and thermal or thermal and thermal processing; not e-beam and e-beam processing[1] | — |
| Multi-layer control | Multi-layer deposition control[1] | — |
| Category | Thermal E-Beam Evaporator (PVD)[1] | — |
| E-Beam Multi-Pocket | 6 x 7 cc[1] | — |
| Chamber Dimensions | 16" x 16" x 28" (high aluminum high vacuum box chamber)[1] | — |
| Base Pressure (clean system) | < 5 x 10-7 Torr[1] | — |
| Debris Shields | One set removable stainless steel debris shields[1] | — |
| Chamber Door | Hinged chamber front door for easy internal access[1] | — |
| Viewport | Large viewport offset to reduce material deposition[1] | — |
| Vacuum Chamber Material | High aluminum[1] | — |
| Ion Assisted Deposition (Nexdep 2 only) | Supported[1] | — |
| Configuration | — | Dial Cover, Side Local Match, Hdpcvd, Ul[2] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →