Comparison ledger
Agilent 5DX, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 5DXAgilent | |
|---|---|---|
| OEM | Agilent | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | –2004 | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 5DX | KLA .496 PSL Wafer |
| Specifications | ||
| Product type | Automated X-ray inspection product[1] | — |
| Associated product categories | Automated optical inspection, solder paste inspection, automated X-ray products[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer size | — | 8 inch[2] |
| Traceability | — | NIST Traceable[2] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[2] |
| Category | — | Metrology & Inspection[3] |
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