Comparison ledger
Agilent 11980 A, Zygo 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | 3DZygo |
|---|---|---|
| OEM | Agilent | Zygo |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Zygo 3D |
| Cited variants | — | |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[2] | — |
| Measurement type | — | Fast, noncontact, high-accuracy, 3D metrology of surface features[1] |
| Software | — | MetroPro software[1] |
| Applications | — | Characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features[1] |
Plan your fab
Building a Precision Optics process? Get a complete equipment list.
Open the fab equipment planner →