Comparison ledger
Agilent 11980 A, Onto Innovation Accent / Bio-Rad QS 2200 A Automated FT-IR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | Accent / Bio-Rad QS 2200 A Automated FT-IROnto Innovation |
|---|---|---|
| OEM | Agilent | Onto Innovation |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | Dual cassette wafer handling |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Onto Innovation Accent |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| Wafer size | — | Dual cassette wafer handling[2] |
| Configuration | — | Si epi, SiN[2] |
| Voltage | — | 120V, 1Ph., 10A, 50/60 Hz[2] |
| Model | — | QS 2200 A[2] |
| Type | — | Automated FT-IR Spectrometer[2] |
| Wafer sizes | — | 4, 5, 6, 8 inch[2] |
| Wafer handling | — | Dual cassette wafer handling[2] |
| Wafer range | — | 100mm – 200mm wafers[2] |
| Beamsplitter | — | Potassium Bromide (KBr)[2] |
| Robot | — | GENMARK 3 Axis Robot with Integrated Flat Finder & Controller[2] |
| Robot interface | — | Accent Robot Interface[2] |
| Stage controller | — | Accent 013-4738-2 Stage Controller[2] |
| AC power box | — | Accent 013-4758-2 AC Power Box[2] |
| Control software | — | Windows XP[2] |
| GUI application software | — | Accent GUI Application Software[2] |
| Interface software | — | SECS/GEM Interface Software[2] |
| Monitor | — | 19” Color Flatscreen Monitor[2] |
| Power requirements | — | 120V, 1Ph., 10A, 50/60 Hz[2] |
| Measurement mode | — | Configured for reflective measurements only[2] |
Plan your fab
Building a Precision Optics process? Get a complete equipment list.
Open the fab equipment planner →