Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, KLA RS 35 Sheet Resistance Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | |
|---|---|---|
| OEM | Accretech | KLA |
| Category | — | — |
| Wafer size | Wafer Equipment | One wafer manual loader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | KLA RS 35 |
| Cited variants | — |
|
| Specifications | ||
| Wafer size | Wafer Equipment[2] | One wafer manual loader[3] |
| Date of Manufacture | 1998[2] | — |
| Currently Configured for | 200mm[2] | — |
| Current Equipment Status | Available[2] | — |
| Available date | Currently Available[2] | — |
| Equipment category | Production Wafer Prober[2] | — |
| Configuration | — | Scan stage[3] |
| Process vac | — | 23 InHg[3] |
| CDA | — | 100 PSI[3] |
| Inlet Power | — | 1 line of 115 vac, 8 amp[3] |
| Wafer Size | — | 6 inch[3] |
| Wafer Handling | — | One wafer manual loader[3] |
| Scan Stage | — | Yes[3] |
| Process Vacuum | — | 23 InHg[3] |