Waferpedia

Comparison ledger

MEP 2500 Edgeversus321

Accretech MEP 2500 Edge, Disco 321, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MEP 2500 EdgeAccretech
321Disco
OEMAccretechDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech MEP 2500 EdgeDisco 321
Specifications
OEM—Disco[1]
Model—321[1]
Equipment type—Wafer Dicing Saw[1]
Facility context—Cleanroom Instrumentation[1]
Application area—Nano and Micro Fabrication[1]
Location—FNT 4.106[1]
Wafer Size—Up to 6 inches[2]
Spindle Power—1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]
Spindle Power (alternate)—1500 Watt spindle[2]
Non-Contact Setup—Non Contact Setup[3]
Microscope—Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]
Broken Blade Detection—Broken Blade Detection[3]
Light Tower—Includes Light Tower[3]
Chuck Type—6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]
Wafer size capability—Up to 6" wafers[3]
Chuck—6-inch porous film frame chuck[2]
Spindle power—1500-watt spindle[2]
Footprint—Small footprint[2]
Setup—Non-contact setup[3]
Blade break detection—Broken blade detection[3]
Other features—Floppy drive, light tower, blade tools, manuals[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com