Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Zygo 7300, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 7300Zygo | |
|---|---|---|
| OEM | ABM | Zygo |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Zygo 7300 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | 7300[4] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Scan Speed | — | ≤135 µm/sec[3] |
| System Zoom | — | Auto; multi (3 pos)[3] |
| Max Scan Range | — | ≤20 mm[3] |
| Objectives | — | From 1X to 100X[3] |
| Max Field of View | — | 14 mm standard; 22 mm optional (with megapixel camera)[3] |
| Turret Options | — | Motorized or Manual (6 Position)[3] |
| Z Stage | — | Motorized (100 mm travel)[3] |
| X-Y Stages | — | Manual (100 mm travel) or Motorized (150 mm travel)[3] |
| Tip/Tilt Stage | — | Manual or Motorized[3] |
| Encoded Z, X-Y Stage | — | Yes (optional)[3] |
| Measurement Principle | — | Scanning white light interferometry (SWLI)[3] |
| Height Resolution | — | 0.1 nm[3] |
| Make | — | Zygo[4] |
| Category | — | Laboratory Equipment[5] |
| Type | — | 3D optical surface profiler / profilometer[1] |
| Measurement principle | — | Scanning white light interferometry[1] |
| Measurement method | — | Scanning white light interferometry (SWLI)[3] |