Comparison ledger
ABM -407B-2-S-CE-S293 Robot, VAT PM 5 Adaptive Pressure Controller, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | VAT |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | VAT PM 5 Adaptive Pressure Controller |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | PM 5[3] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| VAT P/N | — | 225599[2] |
| Software | — | 64PM.3I.00[2] |
| Configuration | — | 50/60 Hz[2] |
| OEM | — | VAT[3] |
| VAT part number | — | 225599[2] |
| Mains frequency | — | 50/60 Hz[4] |
| Mains voltage | — | 100-240V[2] |
| Max power | — | 150W[2] |
| Power required | — | Max. 150 W[4] |
| Ambient temperature | — | 0 - 50°C[4] |
| Pressure control accuracy | — | 0.1% of the sensor full scale range[4] |
| Position control | — | 1,000 positions[4] |
| Pressure sensor input voltage | — | 0 - 1 V, 2 V, 5 V, 10 V (selectable)[4] |
| Sensor input | — | Differential, R i > 100 kOhm[4] |
| Supply voltage | — | ± 15 V (± 5%), max. 1,400 mA[4] |
| Power Failure Option (PFO) battery type | — | NiCd[4] |
| Minimum charge time | — | 10 h[4] |
| Battery lifetime at 35°C | — | 20 months[4] |
| Inputs (interface option) logic | — | Relay contacts or optocoupler[4] |
| Inputs (interface option) analog | — | 0 - 10 V, R i > 100 kOhm[4] |
| Outputs (interface option) logic | — | Potential-free relay contacts max. 70 V, 500 mA[4] |
| Outputs (interface option) analog | — | 0 - 10 V, max. 1 mA[4] |
| Dimensions (w x h x d) | — | 241 x 88 x 264 mm (9.5" x 3.5" x 10.5")[4] |
| Form factor | — | ½ of 19" rack insert, 2 height units[4] |
| Weight (basic unit) | — | 3.4 kg (7.5 lbs)[4] |