Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Pfeiffer HiPace 300 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HiPace 300 Turbomolecular VacuumPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Pfeiffer HiPace |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Configuration | — | With TC 400 Controller Module[3] |
| Product type | — | Turbomolecular vacuum pump[4] |
| Electronic drive unit | — | TC 400[1] |
| Operating voltage, 24 V DC variant | — | 24 ± 5% V DC[1] |
| Operating voltage, 48 V DC variant | — | 48 ± 5% V DC[1] |
| Maximum power consumption, 24 V DC variant | — | 300 W[1] |
| Maximum current consumption, 24 V DC variant | — | 12.5 A[1] |
| Run-up time, 24 V DC variant | — | 1.8 min[1] |
| Maximum power consumption, 48 V DC variant | — | 400 W[1] |
| Maximum current consumption, 48 V DC variant | — | 8.4 A[1] |
| Run-up time, 48 V DC variant | — | 1.2 min[1] |
| Weight, ISO-K | — | 6.7 kg[1] |
| Weight, ISO-F | — | 7 kg[1] |
| Weight, CF-F | — | 8.7 kg[1] |
| HV flange | — | DN 100 ISO-K, DN 100 ISO-F, or DN 100 CF-F[1] |
| Cooling method | — | Standard water, optional air[1] |
| Cooling water temperature | — | 15-35 °C[1] |
| Cooling water consumption | — | 50 l/h[1] |
| Interfaces | — | RS-485, Remote[1] |
| Ultimate pressure with On Tool DryPump | — | <1·10⁻⁷ mbar[1] |
| Rotation speed | — | 60000 rpm (variable 20-100%)[1] |
| Sound pressure level | — | ≤ 50 dB (A)[1] |