Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards IQDP 80 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IQDP 80 DryEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards IQDP 80 Dry |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[3] | IQDP 80[6] |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| Typical Peak Pumping Speed (60Hz) | — | 96 m3/h-1[2] |
| Pumping Speed (60Hz) | — | 56.5 CFM[4] |
| Pumping Speed (50Hz) | — | 47 CFM[5] |
| Ultimate Vacuum (60Hz) | — | 7.5 x 10-3 Torr[4] |
| Ultimate Pressure (50Hz) | — | 2.3 x 10-2 Torr[5] |
| Maximum Continuous Inlet Pressure | — | 1x10*5 Pa[2] |
| Inlet Connection | — | ISO 63[4] |
| Outlet Connection | — | NW 40[2] |
| Exhaust Connection | — | KF40[4] |
| Motor | — | 3 Phase, 200-460V, 50/60Hz[4] |
| Weight (lbs) | — | 477 lbs[4] |
| Weight (kg) | — | 216 Kg[5] |
| Noise Level at 1 m | — | < 70 dB(A)[5] |
| Warm-up Time to Nominal Pumping Performnce | — | 15 min[5] |
| Make | — | Edwards[6] |
| Type | — | Dry Pump[6] |
| Typical peak pumping speed | — | 96 m3/h at 60Hz[2] |
| Ultimate vacuum | — | 3 x 10-2 mbar[1] |
| Displacement | — | 310 m3h-1[1] |
| Pump stages | — | Four-stage[1] |
| Pump mechanism | — | Positive displacement dry pump with intermeshing rotors on common shafts held in phase by timing gears[1] |
| Cooling | — | Indirect cooling system; pump motor is water cooled[1] |
| Gas module | — | Gas Module introduces purge gas into the iQDP pump[1] |
| Control options | — | Pump Display Module, Interface Module, or iQSingle Pumpset Monitor[1] |
| Cooling motor note | — | Both the iQDP and QMB pumps have enclosed, water-cooled motors[1] |
| Equipment type | — | Dry vacuum pump[6] |