Comparison ledger
ABM -407B-1-S-CES293 Robot, Thermawave Opti-Probe 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Opti-Probe 2600Thermawave | |
|---|---|---|
| OEM | ABM | Thermawave |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | — |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Wafer Size Compatibility | — | 4- to 8-inches[3] |
| Laser | — | 675nm thermoelectrically cooled diode laser[3] |
| Spectrometry lamp | — | 450 to 840 nm tungsten halogen lamp[3] |
| BPR range | — | thick dielectric films > 500A[3] |
| BPE range | — | thin dielectric films < 500A[3] |
| Resolution | — | 150nm[3] |
| Product type | — | Thin Film Measurement System[4] |
| Version | — | 200[4] |