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Comparison ledger

-407B-1-S-CES293 Robotversus4002

ABM -407B-1-S-CES293 Robot, Tektronix 4002, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
4002Tektronix
OEMABMTektronix
Category——
Wafer size——
Process node——
Introduced—1969
Production run—1969–
Lifecycle——
Lifecycle milestones—1972 Replaced by Tektronix 4010
Control system——
Generation——
FamilyABM -407B-1-S-CES293 RobotTektronix 4002
Cited variants—
Specifications
ModelABM-407B-1-S-CES293[2]—
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Display technology—Storage tube[1]
Display feature—Partial storage tube with refresh section[1]
Introduced—1969[1]
Host interface—Requires host adaptor[1]
Graphics input capability—Supported via 4901/4903 Interactive Graphic Unit[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org
  2. [2]dealer listingsemistarcorp.com