Comparison ledger
ABM -407B-1-S-CES293 Robot, Onto Innovation Nanospec 9300 Film Analysis, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Nanospec 9300 Film AnalysisOnto Innovation | |
|---|---|---|
| OEM | ABM | Onto Innovation |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Onto Innovation Nanospec 9300 Film Analysis |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | Nanospec 9300[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Manufacturer | — | Onto Innovation / Nanometrics[2] |
| Tool type | — | Film Analysis System[3] |
| Measurement application | — | Thin film thickness measurement[4] |
| Instrument type | — | Spectroscopic Reflectometer (SR)[4] |
| Configured wafer size | — | 12"[4] |
| Alternate wafer handling | — | Can be modified for 8" open cassette handling[4] |
| Visible light source | — | Tungsten halogen lamp[4] |
| UV light source | — | Deuterium arc lamp[4] |
| Lens | — | 4x, 15x (Visible & UV)[4] |
| System computer and monitor | — | Computer & LCD monitor[4] |
| Metrology software | — | Windows XP-based N2000 metrology software (Version N2000 4.2.90 Beta)[4] |
| Head type | — | UV DIO[4] |
| Video camera | — | RS170 (B/W)[4] |
| Wafer handling | — | Kensington Robot & Stage Asyst FOUP 300mm[4] |
| Input power | — | 208 VAC, 18 A, 50/60 Hz[4] |
| Optics | — | 4x, 15x (Visible & UV)[2] |
| Vintage year | — | 2002[4] |