Waferpedia

Comparison ledger

-407B-1-S-CES293 RobotversusF 50 Thin Film Thickness Mapper

ABM -407B-1-S-CES293 Robot, KLA F 50 Thin Film Thickness Mapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
-407B-1-S-CES293 RobotABM
F 50 Thin Film Thickness MapperKLA
OEMABMKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyABM -407B-1-S-CES293 RobotKLA F
Cited variants—
Specifications
ModelABM-407B-1-S-CES293[2]F 50[3]
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Configuration—Model 205-0881[1]
Software version—9.6.9.0[1]
Beginning / Ending nm—378.90 / 1050.80[1]
Integration Time at 3000 Counts on—Si 3.1 ms[1]
Manufacturer—KLA / Filmetrics[3]
Sub-model—205-0881[1]
Spectral Range Start—378.90 nm[1]
Spectral Range End—1050.80 nm[1]
Integration Time—3.1 ms at 3000 counts on Si[1]
Model number variant—205-0881[1]
Spectral range (beginning nm)—378.90[1]
Spectral range (ending nm)—1050.80[1]
Integration time at 3000 counts on Si—3.1 ms[1]
OEM / Make—KLA / Filmetrics[1]
Product Type—Thin Film Thickness Mapper[1]
Listed Model Designation—205-0881[1]
Wavelength Range—378.90 to 1050.80 nm[1]
Model designation—205-0881[1]
Wavelength range—378.90 nm - 1050.80 nm[1]
-407B-1-S-CES293 Robot entryF 50 Thin Film Thickness Mapper entryAsk about these tools →Share experience with this comparison →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]dealer listingsemistarcorp.com
  3. [3]Equipment inventory listing